| 000 | 00362nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 150520s9999||||xx |||||||||||||| ||und|| | ||
| 082 | _a621.381 GHA | ||
| 100 | _a"Ghandhi,Sorab K" | ||
| 245 | _aVLSI Fabrication Principles Silicon and Gallium | ||
| 250 | _a2008 | ||
| 260 | _bWiley | ||
| 300 | _a621.381 GHA | ||
| 600 | _aEngineering | ||
| 942 |
_2ddc _c30905 |
||
| 999 |
_c17183 _d17183 |
||