000 00362nam a2200145Ia 4500
008 150520s9999||||xx |||||||||||||| ||und||
082 _a621.381 GHA
100 _a"Ghandhi,Sorab K"
245 _aVLSI Fabrication Principles Silicon and Gallium
250 _a2008
260 _bWiley
300 _a621.381 GHA
600 _aEngineering
942 _2ddc
_c30905
999 _c17183
_d17183