| 000 | 00359nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 150226s9999 xx 000 0 und d | ||
| 082 | _aCOM | ||
| 100 | _a"Compbell,Stephen A" | ||
| 245 | _aScience & Engineering of Microelectronic Fabrication | ||
| 250 | _a2010 | ||
| 260 | _bOxford University Press | ||
| 300 | _aCOM | ||
| 938 | _b20001 | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c1591 _d1591 |
||